Microscopic structure observation, outermost surface analysis
We carry out surface analysis and morphological observation with a focus on the key words" nano ". In order to meet ever more growing evaluation needs, we offer analysis services using latest equipment such as transmission electron microscope equipped with a spherical aberration correction function and a double EDS detector, and parallel angle resolved X-ray photoelectron spectroscopy (AR-XPS) which enables analysis of the bonding state in the depth direction at the outermost surface of the sample.
Background
Test Items
| analytical techniques | impurities | depth profiling | chemical bonding | identification on organic compounds |
|---|---|---|---|---|
| secondary ion mass spectrometry（SIMS） | ◎ | ◎ | ||
| time-of-flight secondary ion mass spectrometry（TOF-SIMS） | ○ | ○ | △ | ○ |
| X-ray photoelectron spectroscopy/electron spectroscopy for chemical analysis（XPS/ESCA） | △ | ◎ | ◎ | △ |
| Auger electron spectroscopy（AES） | △ | ◎ | △ | |
| transmission electron microscope-energy dispersive X-ray analysis（TEM-EDX） | △ | |||
| transmission electron microscope-electron energy loss spectroscopy（TEM-EELS） | △ | ○ | ||
| scanning electron microscope-energy dispersive X-ray analysis（SEM-EDX） | △ | |||
| atomic force microscope（AFM） |
| analytical techniques | morphology | insulators | non-destructive analysis | micro beam | quantitative analysis |
|---|---|---|---|---|---|
| secondary ion mass spectrometry（SIMS） | △ | ○ | ○ | ||
| time-of-flight secondary ion mass spectrometry（TOF-SIMS） | ○ | △ | ○ | ||
| X-ray photoelectron spectroscopy/electron spectroscopy for chemical analysis（XPS/ESCA） | ○ | ◎ | △ | ○ | |
| Auger electron spectroscopy（AES） | ○ | △ | ○ | ◎ | ○ |
| transmission electron microscope-energy dispersive X-ray analysis（TEM-EDX） | ◎ | ○ | ◎ | ○ | |
| transmission electron microscope-electron energy loss spectroscopy（TEM-EELS） | ◎ | ○ | ◎ | ||
| scanning electron microscope-energy dispersive X-ray analysis（SEM-EDX） | ◎ | ○ | ○ | ◎ | |
| atomic force microscope（AFM） | ◎ | ○ | ◎ | ◎ |
Technical News
-
TN485Visualization of Components and Structure in the Micro Region: Imaging Analysis by Raman Microspectroscopy
-
TN408Evaluation of Contamination from Outgassing by Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS)
-
TN406Qualitative Analysis of Fluorinated Surface Modifiers by Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS)
-
TN339Three-dimensional analysis by TOF-SIMS
-
TN165Surface analysis of wafers after post Cu-CMP cleaning by Time of Flight Secondary Ion Mass Spectrometry（TOF-SIMS）
-
TN148Surface analysis of wafer after post Cu-CMP cleaning by X-ray Photoelectron
Spectroscopy（XPS) -
TN060Time of Flight Secondary Ion Mass Spectrometry (TOF-SIMS)
-
TN002Analysis of Unknown Sample by X-ray Photoelectron Spectroscopy (XPS)
Contact Us for Services
For inquiries and requests concerning services of analysis, measurements, products and consulting, please contact us via inquiry form.