Higher definition and improved yields for electronic devices
The chemical contamination analysis services offered by Sumika Chemical Analysis Service help to reduce molecular contaminants based on the results of analysis performed using the optimal method. We select chemical filters and materials within the clean room, and then select the best locations to measure based on your objectives (such as analyzing problematic processes).
Types of AMCs and analysis methods
Airborne molecular contaminants (ABCs) are largely categorized into five types: A, B, C, D, and E.
TN438Evaluation of acidic and basic contaminants using solid active sampler BremS®
TN200Determination of total phosphorus in clean room air
TN178Evaluation of amines emitted from cleanroom constituent materials by CE/MS
TN063Cleanliness evaluation of environmental air in clean room for semiconductor production process
TN045Evaluation Methods for Trace Impurities in Clean Room Air