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  6. Analysis of Contamination and Foreign Matter

Analysis of Contamination and Foreign Matter

Analysis of minute foreign matter

SCAS performs qualitative analysis by sampling, using our unique sampling technology, contamination and foreign matter which occur in the manufacturing processes for various devices, and inside and outside equipment.

Test Items

By using various techniques such as FIB-TEM/EDX, SCAS investigate foreign materials at nanometer scale as well as micrometer.

analysis process equipment
Sampling On-site sampling, non-destructive sampling, μ manipulator
Cross section processing Microtome, precision polishing, CP, FIB, etc.
Elemental composition EPMA、SEM-EDX、AES、XPS、TEM-EDX
Qualitative analysis XPS, TOF-SIMS, AES, micro FT-IR, laser Raman

Technical News

Contact Us for Services

For inquiries and requests concerning services of analysis, measurements, products and consulting , please feel free to contact us via inquiry form or telephone/fax .