We conduct comprehensive analysis of gases produced by electronic materials, equipment parts/materials, and appliances.
For electronic devices, we analyze outgas from the various materials or equipment which can act as trouble factors. We propose a sampling method to suit the sample, from wafer single-sided sampling, to product constituent parts/materials, and appliances. We can also perform testing in special environments such as reduced-pressure environments and high-temperature heating.
The sample is introduced into the cell, and heating is done while providing a flow of clean gas. The produced gas is then collected and analyzed.
|Object of analysis||Equipment/Principle||Technique/Measurement equipment|
|Raw material||Material comparison or identification||Main pre-treatment methods|
|Investigation of unreacted material, deteriorated material||Dynamic Head Space (DHS) method|
|Evaluation of aldehydes, VOC, SVOC||(Purge & Trap (P&T) method, thermal desorption method)|
|Molded product(parts, materials)||Material comparison or identification||Static Head Space (HS) method|
|Investigation of unreacted material, deteriorated material||Pyrolysis (Py) method|
|Investigation of cause of odor||UV irradiation|
|Evaluation of volatile organic compounds||Main measuring equipment|
|Evaluation of aldehydes, VOC, SVOC||Gas Chromatograph / Mass Spectrometer (GC/MS)|
|Products||Investigation of cause of odor||Evolved Gas Analysis (EGA-MS)|
|Evaluation of volatile organic compounds||Odor Smelling (MPT) -GC/MS|
|Ion Chromatograph (IC)|
|Inductively Coupled Plasma Mass Spectrometer (ICP-MS)|
TN448Ultratrace thermal desorption gas analysis by Atmospheric Pressure Ionization-Mass Spectrometry (API-MS)
TN430Evaluation of outgassing contaminant under vacuum condition
TN425Analysis of Gases Confined in Sealed Space
TN420Measurement of Oxygen Transmission Rate by Coulometric Method
TN408Evaluation of Contamination from Outgassing by Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS)
TN342Measurement Method of Volatile Organic Compounds (VOC) Diffused from Automotive Parts
TN178Evaluation of amines emitted from cleanroom constituent materials by CE/MS
TN095Analysis of Outgas Released from LSI Materials