We conduct comprehensive analysis of gases produced by electronic materials, equipment parts/materials, and appliances.
For electronic devices, we analyze outgas from the various materials or equipment which can act as trouble factors. We propose a sampling method to suit the sample, from wafer single-sided sampling, to product constituent parts/materials, and appliances. We can also perform testing in special environments such as reduced-pressure environments and high-temperature heating.
Test Items
| ICP-MS | IC | CE | GC-MS | GC | |
|---|---|---|---|---|---|
| Element | ○ | ||||
| Ion | ○ | ○ | |||
| Organic compounds | ○ | ○ |
Principle
The sample is introduced into the cell, and heating is done while providing a flow of clean gas. The produced gas is then collected and analyzed.
| Object of analysis | Equipment/Principle | Technique/Measurement equipment |
|---|---|---|
| Raw material | Material comparison or identification | Main pre-treatment methods |
| Investigation of unreacted material, deteriorated material | Dynamic Head Space (DHS) method | |
| Evaluation of aldehydes, VOC, SVOC | (Purge & Trap (P&T) method, thermal desorption method) | |
| Molded product(parts, materials) | Material comparison or identification | Static Head Space (HS) method |
| Investigation of unreacted material, deteriorated material | Pyrolysis (Py) method | |
| Investigation of cause of odor | UV irradiation | |
| Evaluation of volatile organic compounds | Main measuring equipment | |
| Evaluation of aldehydes, VOC, SVOC | Gas Chromatograph / Mass Spectrometer (GC/MS) | |
| Products | Investigation of cause of odor | Evolved Gas Analysis (EGA-MS) |
| Evaluation of volatile organic compounds | Odor Smelling (MPT) -GC/MS | |
| Ion Chromatograph (IC) | ||
| Inductively Coupled Plasma Mass Spectrometer (ICP-MS) |
Outgas, Collection and adsorption graph
Technical News
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TN095Analysis of Outgas Emitted from Electronic Device Components and Materials
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TN430Evaluation of Contaminants from Outgassing Under Vacuum Environment
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TN448Ultratrace thermal desorption gas analysis by Atmospheric Pressure Ionization-Mass Spectrometry (API-MS)
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TN425Analysis of Gases Confined in Sealed Space
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TN408Evaluation of Contamination from Outgassing by Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS)
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TN342Measurement Method of Volatile Organic Compounds (VOC) Diffused from Automotive Parts
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TN178Evaluation of amines emitted from cleanroom constituent materials by CE/MS
Related Informations
Contact Us for Services
For inquiries and requests concerning services of analysis, measurements, products and consulting, please contact us via inquiry form.