Analysis of molecular contaminants on the surfaces and/or surface layers of silicon and glass substrates
We analyze chemical contamination on the surfaces and/or surface layers of substrates, with the goal on managing contamination from process environments and manufacturing systems.
Regulation / Revision
Surface molecular contaminants (SMCs) significantly affect manufacturing yields
Principle

Technical News
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TN200Determination of total phosphorus in clean room air
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TN178Evaluation of amines emitted from cleanroom constituent materials by CE/MS
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TN063Cleanliness evaluation of environmental air in clean room for semiconductor production process
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TN045Evaluation Methods for Trace Impurities in Clean Room Air
Related Informations
Contact Us for Services
For inquiries and requests concerning services of analysis, measurements, products and consulting , please feel free to contact us via inquiry form or telephone/fax .
- Telephone
- +81-3-5689-1219
- FAX
- +81-3-5689-1222