Ultra-high sensitivity for the analysis of trace impurities
SCAS offers ultrahigh-sensitive analysis, by performing pre-treatment in a CR, for surface molecular contaminants (SMCs) on wafers, and contamination such as organic materials, inorganic ions, metallic elements, and particles, which occur in the manufacturing processes for various devices, and inside/outside equipment.
Test Items
| object of analysis | purpose, test item | techniques/apparatus |
|---|---|---|
| Wafer surface, surface layer | Qualification/Quantification of ultra-trace metal components | ICP/MS、ICP/AES、GF-AAS、SIMS |
| Qualification/Quantification of ultra-trace ion components | IC、ICP-MS、IC/TOF-MS、CE、 | |
| CE-MS、CE/TOF-MS | ||
| Qualification/Quantification of ultra-trace organic components | WTD-GC/MS、GC-MS | |
| Local parts of wafer (spots, edges, bevel parts) | ICP/MS、 ICP/AES、GF-AAS | |
| Qualification/Quantification of ultra-trace ion components | IC、IC/MS、IC/TOF-MS、CE、 | |
| CE-MS、CE/TOF-MS | ||
| Qualitative analysis | TOF-SIMS、AES、XPS、 | |
| FT-IR、EPMA、SEM-EDX、 | ||
| TDS、Raman spectroscopy |
Technical News
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TN187NEWUltra-trace Analysis of Metal Impurities in Non-silicon Thin Films on Silicon Wafers
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TN176Chemical Analysis of Ionic Contaminants on Silicon Wafer Surface
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TN426Identification of Foreign Matter by Pyrolysis-GC/MS
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TN410Chemical Analysis of Trace Metal Contamination on φ450 mm Silicon Wafer Surface
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TN347Determination of Trace Impurities on Silicon Surface in Solar Cell
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TN335Analysis of Metallic Impurities in Limited Area of Silicon Wafer
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TN192Phosphorus Analysis of Oxide Film on Silicon Wafer Surface by High Resolution Inductively Coupled Plasma Mass Spectrometry(HR-ICP-MS)
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TN177Sticking Behavior of Acidic and Basic Compounds onto Silicon Wafer Surface
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TN049Determination of impurities in fine ceramics
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TN042Chemical Analysis of Metallic Impurities on Silicon Wafer Surface
Contact Us for Services
For inquiries and requests concerning services of analysis, measurements, products and consulting , please feel free to contact us via inquiry form or telephone/fax .
- Telephone
- +81-3-5689-1219
- FAX
- +81-3-5689-1222