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| Device Surface Evaluation |
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- Analysis of metallic impurities in thin films
- Analysis of trace impurities on wafer surfaces
- Observation of micro sections and elemental analysis
- Qualitative and quantitative analysis of surface films
- Analysis of trace pollutants
- Analysis of wiring defects, performance defects and
micro particles
| Evaluation of Electronic Components |
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- Analysis of bonding defects
- Outgas evaluation
- Analysis of deterioration of chemical materials
| Separating and Sampling Techniques |
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- Micromanipulator
- Cyclone particle sampler
- Sampling kit for clean room air evaluation
- Absorption collection of solvents/solid bodies
- Separation of head space
- Gas generated by heating
- Separation of solvent liquid film surfaces
- Microprocessing
| Analysis and Evaluation of Raw Materials |
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- Analysis of high-purity chemicals
- Analysis of high-purity gases
- Photoresist analysis
- Wettability and corrosion resistance of sealing compounds,
solder and wiring paste
- Evaluation of air in clean rooms
- Component parts
- Filter performance evaluation
- Identification and analysis of liquid crystal compositions
- Analysis of defects in component materials
| Evaluation for Development |
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- Chemical synthesis
- Environment-related analysis
- Evaluation of durability under corrosive environment
- Safety test of chemical products
- Evaluation test for recycling
- Evaluation of manufacturing equipment
- Evaluation of equipment materials
- Evaluation of corrosion of equipment
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